正以“公司成长的源泉是研究开发”的觉悟和信念
专注于基础技术研究和工艺技术开发。
| Structure | Material |
|---|---|
| Substrate (Ceramic) | Aluminum Nitride Silicon Carbide |
| Power Terminal | Inconel, Kovar etc. |
| Heating element | Ag-pd, Ag-pt etc. |
| Insulate layer | Al2O3, SiO2 |
* To be able to customize the heater design
