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Main Machine 256台同步供应
去除金属离子及其他污染物后,在Clean Tank中启动4台按设备供给Drum Filter(50µm↓,Ø1600×1400)
由充液部、超低温储藏罐、气化器及GAS Unit构成,通过气化器实现气体化,向Clean Room只供应纯N2 GAS